PM: Janna Morgan
CM: Harald McFarling
Architect: Halff Associates
Contractor: Austin Commercial
Substanial Completion Date: February, 2012
Research within the clean room was planned to be interdisciplinary from a broad range of engineering and science disciples. The clean room includes a Class 100 lithography area and a Class 10,000 wet and dry processing and characterization area. Highlights of the tool list include: Electron Beam Lithography/Scanning Electron Microscope; Electron Bean and Sputtering Combo Thin Film Deposition System; Thermal Evaporation Thin Film Deposition System; Direct Write Maskless Laser Lithography System; Reactive Ion Etchers (RIE). The nanofabrication Cleanroom and CART facilities are also adjacent to UNT's new technology incubator, providing start-up companies with access to state-of-the-art resources. Arrangements can also be made to accommodate the needs of users from outside the university.
Project Status: Completed
Campus: University of North Texas